JPS5253462Y2 - - Google Patents
Info
- Publication number
- JPS5253462Y2 JPS5253462Y2 JP1974031115U JP3111574U JPS5253462Y2 JP S5253462 Y2 JPS5253462 Y2 JP S5253462Y2 JP 1974031115 U JP1974031115 U JP 1974031115U JP 3111574 U JP3111574 U JP 3111574U JP S5253462 Y2 JPS5253462 Y2 JP S5253462Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Indicating Measured Values (AREA)
- Optical Transform (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974031115U JPS5253462Y2 (en]) | 1974-03-18 | 1974-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974031115U JPS5253462Y2 (en]) | 1974-03-18 | 1974-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50121760U JPS50121760U (en]) | 1975-10-04 |
| JPS5253462Y2 true JPS5253462Y2 (en]) | 1977-12-05 |
Family
ID=28139809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974031115U Expired JPS5253462Y2 (en]) | 1974-03-18 | 1974-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5253462Y2 (en]) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3742229A (en) * | 1972-06-29 | 1973-06-26 | Massachusetts Inst Technology | Soft x-ray mask alignment system |
-
1974
- 1974-03-18 JP JP1974031115U patent/JPS5253462Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50121760U (en]) | 1975-10-04 |